Aluminum Nitride Thin Film Acoustic Wave Device for Microfluidic and Biosensing Applications

Aluminum Nitride Thin Film Acoustic Wave Device for Microfluidic and Biosensing Applications Author Richard Fu and Stuart Brodie
Isbn
File size 740 kb
Year 2021
Pages 38
Language English
File format PDF
Category Engineering and Technology

Book Description:

A paper that tackles film bulk acoustic wave devices for microfluidic piezoelectric films and use of aluminum nitride as a common piezoelectric material for biosensing applications.

 

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